durusmail: mems-talk: piezoresistive coefficients of polysilicon
piezoresistive coefficients of polysilicon
2005-08-27
piezoresistive coefficients of polysilicon
Kavin Liao
2005-08-27
Hello

I am wondering whether any one of you have  ever used  the piezoresistive
coefficient of polysilicon ..
I am using the polysilocn as piezoresistive material . I want to find DELTA R/R
for the cantilever structure by simulation in intellisuite. Hase you worked on
this and could you please provide me some idea?

Thank you very much.

Best regards,

Kavin Liao
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