durusmail: mems-talk: High etch rate of silicon using Dry etching method
High etch rate of silicon using Dry etching method
2005-08-30
harshal rokade
2005-08-30
Brent Garber
Determining the polarity of very small voltages
2005-09-02
Roger Brennan
2005-08-30
JoyH Jonesq
High etch rate of silicon using Dry etching method
harshal rokade
2005-08-30
Hi,

We have STS's PC 320 RIE system. i am interested in knowing, is it posible to
etch silicon using this system with very high etch rate may be around 20um/min.
which gases will be reqiiured?

Thanks in advance
Harshal Rokade
IIT Bombay,
India
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