Harshal,

I would think any RIE system would etch Si.  You can start with SF6 for fast
etching.

Brent

harshal rokade wrote:

> Hi,
>
> We have STS's PC 320 RIE system. i am interested in knowing, is it posible to
etch silicon using this system with very high etch rate may be around 20um/min.
which gases will be reqiiured?