durusmail: mems-talk: RE: Selective Cu & Cr Etchant
RE: Selective Cu & Cr Etchant
2005-08-30
RE: Selective Cu & Cr Etchant
Rajib mukherjee
2005-08-30
Hi,

I have used the same process as you require--Electroplating Ni on Cu/Cr and
etching Cu/Cr with nickel intact. Use Nanostrip to selectively etch Cu/Cr
without etching Ni. It does a very good job.Took me around 2-3 mins for
200nm of Cu on 50nm of Cr.

regards
Rajib
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