durusmail: mems-talk: multi-layer SU-8
multi-layer SU-8
2005-08-11
2005-08-11
2005-08-31
2005-08-31
2005-08-12
2005-08-31
multi-layer SU-8
Ren Yang
2005-08-31
Hi Lee,

It is necessary to do post-bake before you deposite
metal layer and coat the second SU-8 layer. Fully
cross-linked SU-8 surface will be better for the metal
layer deposition.

Ren Yang

--- Chen-Han Lee  wrote:

> Hi Ren,
>
> thanks for the information
> just one thing, between exposuring of the first
> layer and depositing of the
> second layer,
> is it necessary to do a post-expose bake?
> cos I think the first layer su-8 will be
> over-crosslinked if the postexpose
> bake is performed.
> on the other hand, a post-exposure bake must be
> performed immediately after
> exposering, according the datasheets.
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