Hi

I was trying to simulate a micro thermal actuator created by Micragem
fabrication technology. Even if I consider conduction through structure as the
only mode of heat transfer in the structure I get a temperature rise of around
21C at even  8v. I fixed my pad temperature to be fixed at 20C. So this rise
looks to be pretty unrealistic to me. I took the resistivity of SCS used in
Micragem as 2.756 ohm-cm. But when I use polysilicon resistivity (2e-3 ohm-cm)
with other SCS properties as unchanged, I get temperature rise upto 2700C for
the same voltage applied. So I was wondering whether some one simulated micro
thermal actuator fabricated in Micragem and got expected results. Any help will
be appreciated.

Thanks,
Arefin Anwar,
Concordia University