Greetings,
Yes spin coating works well.It is not as  simple as it sounds
..If you need you may want to read up on it if you have not done so already.
Also you may consider polyimide works very well.We use it to manufacture IC's
Kind Regards
www.elume.com

-----Original Message-----
From: Ho Yin Chan [mailto:chanho1@msu.edu]
Sent: Wednesday, August 31, 2005 12:06 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] Spin on dielectric layers

Hi all,

  I am fabricating a typical transistor recently. But, due to the
unavailability of the SiO2 deposition system, I use SiO2 as an dielectric
layer. So, I am looking for other alternatives. I think the only process I
can do is spinning or thermal evaporation. I am thinking of spin-on-glass
(SOG). Do you guys have experience on this and would like to kindly sharing
with me? Also, do you have any other alternatives?