durusmail: mems-talk: about the max thickness of LPCVD desposited PSG
about the max thickness of LPCVD desposited PSG
2005-09-06
2005-09-09
about the max thickness of LPCVD desposited PSG
乔大勇
2005-09-06
I want a sacrificial layer with a thickness about 4 micro. Because the commonly
used PSG is 2 micro, i wonder whether PSG can be desposited with a thickness of
4
micro in LPCVD equipment? If YES, anybody can tell me the detail or tip of
deposition process? I mean how to protect the PSG against stress induced crack?
thanks.
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