Greetings,
Years ago I used paralyne ,however we had a depo machine that was made
specifically to deposit this material.
So before I can answer your  etching question I need to know whether you use
what in my time was the paralyne patented process.

Regards
Walter Essinger
www.elume.com

-----Original Message-----
From: Johannes Grether [mailto:johannes.grether@polymtl.ca]
Sent: Tuesday, September 06, 2005 6:50 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] plasma etching of parylene

Hi all together,

I have got a question concerning etching of parylene. As far as I know, the
way
to etch parylene is an oxygen plasma etching process. As the ratio to a
resist
is about 1:1, I want to use a chromium mask to pattern the parylene during
the
etching.
My question is: has anybody any expertise in this etching process and can
give
me some data that I can use as a guideline?

Thanks in advance.
Johannes