durusmail: mems-talk: su-8 hardbake
su-8 hardbake
su-8 hardbake
Chen-Han Lee
2005-09-19
hi,

could anyone tell what temperature and duration is usually used in hardbake
for su-8?
Once reached the desired time, do u remove it from the hotplate or turn the
hotplate off and leave the su-8 sample on it?

thanks in advanced

chenhan


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