durusmail: mems-talk: strength of silicon nitride film
strength of silicon nitride film
2005-09-21
strength of silicon nitride film
Huisheng jiao
2005-09-21
Hi, I would like to use silicon nitride membrane window to seal an vacuum
chamber. does anybody got the information of the relationship between the
burst pressure and the geometry of the silicon nitride. Any information will
be appreciated. Thanks in advance. Huisheng
reply