Hello,

I know a recipe for thick SU-8 hardbake: 150 ° C for 3 hours,

Good luck


-----Original Message-----
From: Chen-Han Lee
Sent: lundi, 19. septembre 2005 16:58
To: Mems-Talk
Subject: [mems-talk] su-8 hardbake


hi,

could anyone tell what temperature and duration is usually used in hardbake
for su-8?
Once reached the desired time, do u remove it from the hotplate or turn the
hotplate off and leave the su-8 sample on it?