durusmail: mems-talk: Gold on PMGI
Gold on PMGI
2005-10-02
回复: [mems-talk] Gold on PMGI
2005-10-02
Gold on PMGI
Giuliano Gregori
2005-09-30
Hello,

I'm trying to deposit a 0.5 micron layer of titanium/gold on a portion
of a PMGI mesa, but after the lift-off there are no metals left.
I use titanium only to improve the adhesion between metal and resin.
Note that the PMGI is previously baked at 230 °C for 5 minuts and
reflowed at 300 °C for 7 minuts.
I wonder whether anybody has an idea how I could increase the adhesion
between PMGI and metals.

Thanks !
Giuliano
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