I believe Capton (sp?) tape has a low vapor pressure. I use it in a sputtering system with no problems getting to mid 10^-7 Torr. Thomas -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Gary Sent: Thursday, October 20, 2005 11:08 AM To: General MEMS discussion Subject: RE: [mems-talk] double-sided adhesive tape Andrey, Double sided tape in a high vacuum system could very well be something of a problem as the components of the adhesive will in all likelihood evaporate and contaminate the vacuum conditions. Gary Gary Hillman