Kris, I developed the image reversal system at Yes and I am baffled at the moment. The only time I saw crystal problems was in very early development when I was using liquid ammonia ( ammonia hydroxide) when I got lots of ammonia salts. Is it possible your resist has a high water content and you are creating liquid ammonia, then salts. Contact me directly and we can go into this with more depth. bmoffat@yieldengineering.com Bill Moffat, CEO Yield Engineering Systems, Inc. 2185 Oakland Rd., San Jose, CA 95131 (408) 954-8353