Hi, Andrey,

   I use regular double-sided tapes for evaporation. It is ok for me. The
pressure I reach is about 10-5 torr range.

Richard

----- Original Message -----
From: "áÎÄÒÅÊ
ôËÁÞÅÎËÏ" 
To: 
Sent: Thursday, October 20, 2005 4:17 AM
Subject: [mems-talk] double-sided adhesise tape

> Hi,
> It's common knowledge that double-sided adhesive tapes are used for dicing
> and drinding. But I have heard about its application for evaporation or
> sputtering as wafer mount. Has anybody such experiance? Would you mind to
> advise anything about it?
>
> Thank you in advance, Andrey.