I don't think you can get SU-8 that thin. I think you'd have to dilute it so
much you'd lose the photo properties. (We use a barc to get a 800nm thick
and it seems about as viscous as water).

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of Mark.E.Curtis-1@ou.edu
Sent: Monday, October 31, 2005 4:34 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] Thinning SU-8 2002

Hello,

I was wandering if anyone has any experience in thinning SU-8 2000.  I have
SU-8 2002 and the SU-8 2000 thinner.  I would like to be able to spin-on a
100 nm or thinner layer of SU-8, but I don't know if this is even possible.
If anyone has any advice on this or knows how thin I could possibly make a
layer of SU-8, it would be greatly appreciated.  Thanks.