Hi Eric,
I've had similaer problems preparing cross-sections. You can mount the
sample in a suitable polymer, then do a chemical/mechanical polish. However,
this is slow and gives considerable contamination from the slurry. The best
results I have found come from FIB milling, if the area is small, otherwise
it can become very expensive.

Regards,
Trevor
----- Original Message -----
From: "Eric J. Correa" 
To: 
Sent: Monday, November 07, 2005 5:36 PM
Subject: [mems-talk] SEM Thickness Measurement


> Hi Everyone:
>
> I am trying to measure UNCD (diamond) thickness using a SEM
> by looking at the cross sectional area.  I am using a
> diamond tip to cut my samples but I am not able to get a
> clean cross-sectional area.  I was just wondering if anyone
> has any advice or recommendation.