Hi Sokwon, I got photodefinable PDMS from Dow a couple months ago and they provided me with the processing instructions. I suggest you just contact the manufacturer of your PDMS photoresist and they should be able to give you the appropriate instructions. good luck, Joe Grogan Quoting sokwon Paik: > Hi! > > Does anybody know the recipe for the PDMS for photoresist? > > I want to coat around 2 micro meter and then do the UV exposure. > > Please reply me if you know anything about this. >