I've been using a TC Bond recipe that runs over 8 hours. I'm sure a much shorter time would suffice. For padding I use 0.5 mm flexible graphite from Goodfellow. You may be able to reduce the bond pressure if the temperature is increased. Roger Shile -----Original Message----- Subject: Re: [mems-talk] Au/Au thermocompression Thanks Roger, an additional information: for how long you kept your samples in your machine? The temperature =20 you chose looks preaty low. One more thing: what would you suggest as soft material (Al foil =20 perhaps?). Lorenzo