durusmail: mems-talk: PDMS photoresist recipe
PDMS photoresist recipe
PDMS photoresist recipe
Vijay Sivan
2005-11-14
Hi,
Wondering why you have to coat on photoresist and do the UV exposure. PDMS
is thermally cured and not optically.
Cheers
VJ

----- Original Message -----
From: "sokwon Paik" 
To: 
Sent: Monday, November 14, 2005 2:42 PM
Subject: [mems-talk] PDMS photoresist recipe


> Hi!
>
> Does anybody know the recipe for the PDMS for photoresist?
>
> I want to coat around 2 micro meter and then do the UV exposure.
>
> Please reply me if you know anything about this.
>
> Thanks,
>
> Sokwon Paik
>
>

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