durusmail: mems-talk: PDMS photoresist recipe
PDMS photoresist recipe
PDMS photoresist recipe
Vinodh Murali
2005-11-15
What PDMS photoresist did you use?

  Vinny

jgrogan@seas.upenn.edu wrote:
  Hi Sokwon,

I got photodefinable PDMS from Dow a couple months ago and they provided me
with the processing instructions. I suggest you just contact the manufacturer
of your PDMS photoresist and they should be able to give you the appropriate
instructions.

good luck,
Joe Grogan
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