durusmail: mems-talk: Argon plasma for gold etching
Contact angle of Silicon and SiO2
2005-12-02
2005-12-05
Argon plasma for gold etching
2005-12-07
2005-12-08
Argon plasma for gold etching
Richard Chang
2005-12-07
Hi, All,

   I want to use argon plasma to etch away exposed gold.
   My thickness of gold is 1 micron.
   Does anybody have the recipe for the plasma etching, like RF power,
pressure of Argon?
   How long it might take to etch away 1 micron thick gold?
   Thank you.

Best Regards,

Richard


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