durusmail: mems-talk: etchants for TaAl
etchants for TaAl
1998-06-08
etchants for TaAl
Chang-Ho Cho
1998-06-08
 I am looking for some etchants for TaAl. And I wanna know what is TaAl, for
exaple, adhesion to Al or other meterial, melting points, ect. We have some
problem in using TaAl as a heating structure. TaAl is burned out. If you know
the reasons, please teach me...

Thanks.


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