durusmail: mems-talk: Boron implantation/thermal diffusion
Boron implantation/thermal diffusion
2005-12-19
2005-12-19
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2005-12-21
2005-12-23
2005-12-22
2005-12-22
Boron implantation/thermal diffusion
Vinay
2005-12-19
Hello All,
We are trying to perform boron diffusion on silicon and hoping to achieve
depths in the range of 20 to 25um. I spoke to a couple of companies who do
ion implantation and they suggested i go with thermal diffusion of boron as
against ion implantation. What do you guys think? Any suggestions or
comments would be greatly appreatiated.

Thanks,
vinay
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