durusmail: mems-talk: hot plate or infrared?
hot plate recommendation
2006-01-07
PMMA solution
2006-01-09
2006-01-09
hot plate or infrared?
2006-01-10
vacuum baking?
2006-01-10
Wet etching? Dry etching?
2006-01-10
2006-01-11
2006-01-16
hot plate or infrared?
Andrew Xiang
2006-01-10
My substrate is concave shaped, the heat will not be uniform on a hot plate
and it will form ring.
Has anyone tried infrared baking?

-Andrew

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