What kind of laser do you use for 320nm?
Gas laser or solid state?
power?
Does it have stable mode?

-Andrew

----- Original Message -----
From: "Richard Chang" 
To: "General MEMS discussion" 
Sent: Tuesday, January 17, 2006 1:19 PM
Subject: [mems-talk] SU-8 layer is curved up during postbake


> Hi, All,
>
>   I expose a thick SU-8 2100 layer with a 320nm laser. After postbake, I
> found out the layer is curved up.
>   The picture is shown in the link below.
>
>   http://base.google.com/base/items?oid=15423750006658009412
>
>   We used a broadband UV  before for exposure and we never have the
> problem like this with the same layer of SU-8.
>   Any suggestion would be appreciated.
>   Thank you.