durusmail: mems-talk: How to make a thin-film of PDMS with through patterns?
How to make a thin-film of PDMS with through patterns?
How to make a thin-film of PDMS with through patterns?
xiangyu100@gmail.com
2006-01-20
Hi, Guys,
     I am trying to make a thin-film of PDMS, having some through patterns
on it; i.e., the PDMS film will have many holes through the entire thickness
of the film. This PDMS film will later be attached onto another thick,
patterned PDMS layer, to complete the system.
     I know people have used RIE to etch PDMS.  Is there any easier way to
accomplish this? Thanks a lot.


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Best Regards,
Shawn
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