durusmail: mems-talk: Thin PDMS Films
Thin PDMS Films
Thin PDMS Films
xiangyu100@gmail.com
2006-01-20
Hi, Patrick,
    I saw your post about thin PDMS films on mems-talk. I am trying my first
time making such a thin PDMS film with through patterns, but faced some
problems. Do you mind sharing more info on how you made your stuff?
    You mentioned that
"using a variable height silk screening squeege, parafilm wax sheets, metal
shim stocks, a very flat surface, tape, and industrial grade PDMS (RTV); the
PDMS was mixed 10:1 (standard mix ratio) and squeeged on the parafilm. The
cure time is ~ 24hrs room temp. Once the pdms cures on the parafilm it is
easily peeled off and ready for use. Using this technique I think the limit
is a PDMS film thickness of 25um, due to their fragility."
    What kind of flat surface were you using? When to use parafilm wax
sheets? Do you have a more detailed protocol or receipe for this? Coz our
lab never used anything like silk screening squeege.
    Any comments will be appreciated. Thank you very much.

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Best Regards,
Shawn
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