Dear MEMS community,

does anyone know of a TaON Chemical etchant ?

TaON is Tantale oxynitride

Thanks in advance

Eric
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Eric Bonnotte

Schlumberger Wireline and Testing
SRPC- Clamart
26 rue de la cavee
92140 Clamart
FRANCE

Tel : +33 (0)1 45 37 22 95
Fax : +33 (0)1 45 37 26 93

email : bonnotte@clamart.srpc.slb.com
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