durusmail: mems-talk: polyimide dry-etch
polyimide dry-etch
2006-01-25
Suitable application for a double chamber micropump
2006-01-27
polyimide dry-etch
Giuliano Gregori
2006-01-25
Hello everybody,
what's a good process to dry-etch a HD 8820 polyimide sacrificial layer
2-3 micron thick ?
Thanks in advance !

Giuliano

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