durusmail: mems-talk: infrared spectra for a-Si3N4 and SiON thin films
infrared spectra for a-Si3N4 and SiON thin films
1998-06-01
1998-06-22
infrared spectra for a-Si3N4 and SiON thin films
Mircea Modreanu
1998-06-22
Hello,
I try to find information about infrared absorbtuion spectra for  a-Si3N4
and SiON thin films. Can somebody to help me with some references?
Best regards
M.Modreanu, CVD Eng.
National Institute for Microtechnology
PO BOX 38-160,
Bucharest Romania
E-mail:mirceam@imt.ro


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