A mechanical pump must be either a corrosive series pump or just a pump made for mech oil. To use Fomblin, the pump must be "Fomblin prepped". This means the seals in the pump are made for Fomblin oil or corrosive service. Now that you have used regular mechanical pump oil, the pump must now be sent out to be cleaned and if it is not a corrosive series pump, it must be rebuilt. Many companies do this work for around $1100. Write me if you want the name of a good pump rebuilder. Brent Original Message: ----------------- From: shenghong qiu qshenghong@gmail.com Date: Sat, 11 Feb 2006 22:12:27 -0500 To: mems-talk@memsnet.org Subject: [mems-talk] wrong pump oil used Hi, I have a Alcatel pump neeed to use Fomblin oil. However, I wrongfully used general mechanic pump oil(fishbrand 19) for a while. Until I find the capacity is lower. I am really new in vacum area. Would you please give me any suggestion on this issue now? Need to send back or some pump service company for cleaning? Or I can just drain the oil out and add new Formbin oil? Thanks a lot