Shenghong, If your process does not require a pump that uses Fomblin oil you should be ok running with the present hydrocarbon oil in the pump. You can run hydrocarbon oil in a pump that has seals for Fomblin service but do not try to run with fomblin in a pump setup with seals for hydrocarbon oil. If the process requires the Fomblin you will need to have the pump serviced. Don't try to flush out the pump; the pump will not work for long and you end up with a jell material in the bottom of the pump. Processes that require fomblin are ones that use O2 or have corrosive by products. If you need the pump to be serviced let me know. Regards, Dave Freedman Office: 919-303-7801 Cell: 336-210-6548 -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of shenghong qiu Sent: Saturday, February 11, 2006 10:12 PM To: mems-talk@memsnet.org Subject: [mems-talk] wrong pump oil used Hi, I have a Alcatel pump neeed to use Fomblin oil. However, I wrongfully used general mechanic pump oil(fishbrand 19) for a while. Until I find the capacity is lower..... I am really new in vacum area. Would you please give me any suggestion on this issue now? Need to send back or some pump service company for cleaning? Or I can just drain the oil out and add new Formbin oil? Thanks a lot