durusmail: mems-talk: anisotropic etching of silica
anisotropic etching of silica
2006-02-24
2006-02-25
2006-02-28
2006-02-28
anisotropic etching of silica
yilei zhang
2006-02-24
Dear colleagues,
Is there a way to get high aspect ratio of silica structures? Like DRIE for
silicon? Thanks.

Regards,
Yilei Zhang

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