Hi,

I'm wondering if anyone has the process information to spin PI-5878G
polyimide made by HD Microsystems. I want to spin this polyimide on a
Nickel substrate. Then I want to spin PR on the polyimide, pattern the
PR and deposit metal, all the while using the polyimide as a substrate
and unchanged. I basically want the following information:

1) Spin speeds and thickness (a spin speed curve would be helpful) for PI-5878G.
2) Baking temperatures, steps and time for curing.
3) Is it necessary to use a primer like VM-651 or VM-652 to promote
adhesion between Nickel and the polyimide? If so what is the process
to apply the primer?

Thanks.

--
Chetan Ramesh
Graduate Student
Micro Systems Group
Dept. of Mechanical Engineering
LSU, Baton Rouge, LA 70803