Steph This is a most regular novolak based resist. Very much the 1518 etc just with higher solid content and viscosity to give the thickness. Shay -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of steph champ Sent: Tuesday, March 21, 2006 11:51 AM To: mems-talk@memsnet.org Subject: [mems-talk] AZ4562 Does anybody know the composition of this positive photoresist ??? I don't really need the whole formulation, but if you have some clues about it, let me know