Hi steph , There is in this photoresist the some solvent and the most important thing the photo active compound DNQ (Diazonaphtoquinone) if you want more information about the positive phoresist AZ4562 you should visit this following website www.microchemicals.com/lithography/photoresist_0002.html . I hope that It will help you. Abdou >From: "Shay Kaplan">Reply-To: General MEMS discussion >To: "'General MEMS discussion'" >Subject: RE: [mems-talk] AZ4562 >Date: Tue, 21 Mar 2006 17:15:11 +0200 > >Steph >This is a most regular novolak based resist. Very much the 1518 etc just >with higher solid content and viscosity to give the thickness. >Shay > >-----Original Message----- >From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] >On Behalf Of steph champ >Sent: Tuesday, March 21, 2006 11:51 AM >To: mems-talk@memsnet.org >Subject: [mems-talk] AZ4562 > >Does anybody know the composition of this positive photoresist ??? >I don't really need the whole formulation, but if you have some clues about >it, let me know >