Thanks for your answers about AZ4562

I have another question, I currently use the S1818, and the photoactive
compound is diazonapthoquinone
with a A Novalac Resin as binder and the PGMEA as solvent.
Do you have an idea of the photoactive compound in AZ4562 (given the binder
and the solvent are the same) ? Is it the same as AZ4562 ?

Steph

>From: "Shay Kaplan" 
>Reply-To: General MEMS discussion 
>To: "'General MEMS discussion'" 
>Subject: RE: [mems-talk] AZ4562
>Date: Tue, 21 Mar 2006 17:15:11 +0200
>
>Steph
>This is a most regular novolak based resist. Very much the 1518 etc just
>with higher solid content and viscosity to give the thickness.
>Shay