durusmail: mems-talk: Is there any way to etch a hole through on silicon wafer?
Is there any way to etch a hole through on silicon wafer?
2006-04-03
Is there any way to etch a hole through on siliconwafer?
2006-04-03
Is there any way to etch a hole through on silicon wafer?
Is there any way to etch a hole through on silicon wafer?
2006-04-07
native silicon oxide growth rate
2006-04-09
2006-04-10
Is there any way to etch a hole through on silicon
2006-04-04
Is there any way to etch a hole through on silicon wafer?
Jeff chen
2006-04-03
Hi,

I am working on a project which needs to etch a hole through the
silicon wafer (525 micron thick). The hole diameter is around 50
micron.
Does anyone have experience to do that?
Is there any way to do that? Etching? Laser excimer? or grounding
technology?

Thanks a lot.

Best,
Jifeng
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