i've done it in 250 micron thick silicon using hf nitric acetic -
etched from both sides - how critical is alignment and dimension =
control?

> Date: Fri, 7 Apr 2006 16:41:30 -0700
> From: "Leo Petrossian" 
> Subject: Re: [mems-talk] Is there any way to etch a hole through on
>        silicon wafer?
>
> > I am working on a project which needs to etch a hole through the
> > silicon wafer (525 micron thick). The hole diameter is around 50
> > micron.
> > Does anyone have experience to do that?
> > Is there any way to do that? Etching? Laser excimer? or grounding
> > technology?