Yes. You can. SiN layer can be used as Cu diffusion layer.

----- Original Message -----
*From:* "Xiaoding wei" 
*To:* mems-talk@memsnet.org
*Sent:* 04 April 2006 03:46:34
*Subject:* [mems-talk] Growing SiN on copper film using PECVD?


> Hi, Does anyone know if I can grow a SiN layer on copper film using
> PECVD method?