Hi Peter, I am growing silver layers on PMMA and I have found e-beam evaporation to work well. Regards, Kevin On 4/20/06, Basa Peterwrote: > Hi, > > I'd like to make metal contact to a PMMA layer (on Si substrate). > Anyone has an idea which is the best method to do that (evaporation, > sputtering, etc.)? I don't want to harm the PMMA layer.