Dear All, When I do photolithography on glass substrate I found two problems: 1) The pattern cannot develop well on the photoresist (LOR + S1805), although I found that there is no such problem for using SiO2 as substrate. 2) It is extremely difficult to lift-off the metal layer (50nm Cr and 400nm Au). I put the substrate in CD-26 for 2 day but no metal comes out. Can someone give me ideas to solve the problems? Thanks a lot in advance, Alex