durusmail: mems-talk: Re: Asking help on Cu etchants
Re: Asking help on Cu etchants
1998-03-23
1998-03-24
1998-04-13
Re: Asking help on Cu etchants
Adam Cohen
1998-03-23
Try Enstrip C38 from Enthone, 203-932-8535.


Good luck,

Adam Cohen


 At 03:07 PM 3/20/98 -0600, you wrote:
>Hi,
>
>Now we are developing a structure, using Ni(structural layer) and Cu
>(sacrificial layer). We want to find a good etchant for Cu, but not
>attacking Ni or permalloy.
>
>So could anyone give me some information about that?
>
>Thanks a lot!
>
>Jun Zou
>
>
>--------------------------
>Jun Zou
>209 E.Clark Street Apt#2
>Champaign, IL 61820
>USA
>Tel:(217)-265-0808(O) (217)-351-7448(H)
>E-mail: junzou@uiuc.edu
>--------------------------
>
>
>


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