Hi,

Try water with 5% acetic acid, and 5% H2O2.
The percentage can be changed according to
your needs.

Tseng-Yang Hsu
Integrated Micromachines
yang@micromachines.com


-----Original Message-----
From: Jun Zou 
To: MEMS@ISI.EDU 
Date: Saturday, March 21, 1998 8:39 PM
Subject: Asking help on Cu etchants


>Hi,
>
>Now we are developing a structure, using Ni(structural layer) and Cu
>(sacrificial layer). We want to find a good etchant for Cu, but not
>attacking Ni or permalloy.
>
>So could anyone give me some information about that?
>
>Thanks a lot!
>
>Jun Zou
>
>
>--------------------------
>Jun Zou
>209 E.Clark Street Apt#2
>Champaign, IL 61820
>USA
>Tel:(217)-265-0808(O) (217)-351-7448(H)
>E-mail: junzou@uiuc.edu
>--------------------------
>
>