durusmail: mems-talk: relative virtues of organics cleaning processes
relative virtues of organics cleaning processes
2006-05-13
relative virtues of organics cleaning processes
Jauniskis, Linas
2006-05-12
Hello all,

Could anyone comment on the relative virtues of organic cleaning
processes like piranha etch, oxygen plasma and uv/ozone?

Do they all accomplish the same thing at the end of the day and your
choice is then driven by materials and process compatibility issues; or
is one more effective than the others; or is each most effective on
different types of organic contaminants?

Thanks in advance for your insights.

Linas.
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