How about vacuum pre-baking. Bill Moffat

-----Original Message-----
From: Jiang Ziling
Sent: Friday, May 19, 2006 6:34 AM
To: General MEMS discussion
Subject: [mems-talk] Su8 2100 bubble problem

Hello,

  Does anyone know how to eliminate the air bubbles appearing after
pre-baking of Su8 2100 at 95C?