It depends upon the thickness of the oxide. A standard I.C. depends upon a Silicon Dioxide layer being an insulator with aluminum lines crossing over the oxide. We rely on this thick layer not being reduced by the annealing of the aluminum. Typical oxide thickness 10,000 Angstroms will remain an insulator. Bill Moffat -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of polly Sent: Monday, May 22, 2006 12:39 AM To: mems-talk@memsnet.org Subject: [mems-talk] Query regarding ability of Aluminum to reduce nativeSiO2 Dear Sir I would to enquire if aluminum deposited on native oxide would give an ohmic contact after post metalization anneal cycle at 450C. as theoretically aluminum can reduce the native oxide to make contact with silicon. pourus