durusmail: mems-talk: Capacitive accelerometer
Capacitive accelerometer
2006-05-30
Capacitive accelerometer
trinadh allaka
2006-05-30
Hai all........

can any body tell me the maximum resonant frequency of comb type capacitive
accelerometer (gap varying). From liturature I found that ADXL has 22KHz
accelerometer. If I design it for more than 15KHz I am not getting inplane
mode as first mode.... Can any body suggest me regarding this??
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Trinadh.A
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